Combustibility, toxicity, Freon, and gases with organic compound properties, etc. are used in various industrial sites, and gas detectors are installed and operated to prevent gas leakage accidents at these sites. Semiconductor production facilities, however, use different gas detectors for various gases such as C4F6, CH2F2, CH3F, C5F8, COS, CH4, and CO, making it difficult to purchase, install, and maintain each product. Furthermore, ethanol, isopropyl alcohol, and FC-3283, etc., commonly used as cleaning ingredients that cause interference in the measurement of gas detectors, have been pinpointed as the main culprit for malfunctioning the detectors.

To solve this issue, the GTD-5000 (hereinafter referred to as the detector) is equipped with technology to accurately detect combustible, toxic, Freon, and organic compound gases while keeping the detector from malfunctioning due to interference gases, and it can thus safely detect various harmful gases at affordable prices.

Gas detector for Nitrogen Trifluoride (NF3) used in Semiconductors are available with IR methods which provides maintenance and interference free operations without requiring the use of Pyrolyzer.

Features

Equipped with an algorithm that prevents interference gases (types of alcohol other than IPA, ethanol, and FC3283) other than those targeted for measurement from causing malfunction
Detecting gas leaks promptly with its built-in high-performance pump
Having a built-in function that automatically adjusts the flow rate
Able to measure low to high concentrations of Freon, flammable, and toxic gases through a mechanism applied with various sensing techniques
Utilizing a one-on-one interactive setting method based on the color graphic TFT LCD
Having a built-in self-diagnosis function
Mounted with a two-level gas alarm system, along with one fault indicator and relay contact outputs
Installed with gas 4-20mA current interface outputs
Easy to configure a monitoring system using the RS-485 Modbus and PoE Modbus TCP communication

The Multi-Component Gas Analyzer VA-5000 Series is an all-round analyzer that satisfies measurement needs as required for environmental monitoring, energy development support, quality controls, and continuous emission monitoring, etc. The VA-5000 Analyzer can be configured with up to 4 detector modules within a single case. Many combinations of detector modules with a wide selection of ranges allows this series of analyzers to be used for a variety of applications. The VS-5000 Sample Gas Conditioning Systems are designed to support the VA-5000 Analyzers by proving the optimal sample conditions for measurement. We also have wall mounted type analyzer (VA-5000WM) that enables to install in a limitted installation space.

Features

Simultaneous measurement of up to four gas components
Auto pressure compensation provides stable measurements by compensating for barometric pressure changes
Employs a thermostatically controlled gas flow sensor to increase accuracy of measurements
A 5.7 inch LCD touchscreen provides analyzer information measurement status, trend graphs, diagnostics and analyzer settings
Detector modules can be added or replaced quickly
A front panel USB allows instrument instant settings to be logged in addition to sample data